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The Physics of Micro/Nano-Fabrication (Microdevices)

Ivor Brodie, Julius J. Muray




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 | #3006626 in Books |  Springer |  1993-01-31 | Original language:English | PDF # 1 |  10.00 x1.50 x7.01l,2.99 | File type: PDF | 622 pages

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.



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