[PDF.44ea] Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: ... Series in Electronics and Photonics)

Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: ... Series in Electronics and Photonics)

[PDF.qf49] Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: ... Series in Electronics and Photonics)

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 | #10513452 in Books |  Springer |  2011-12-07 | Original language:English | PDF # 1 |  9.02 x.89 x5.98l,1.15 | File type: PDF | 374 pages

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In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the application of ion implantation to semiconductors and other materials (Thousand Oaks 1970, Garmisch-Partenkirchen 1971, Osaka 1974, Warwick 1975, Boulder 1976, Budapest 1978, and Albany 1980). Another series of conferences was devoted more to implantation equipment and tech niques (Salford 1977, Trento 1978, and Kingst...

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