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Chemical Vapour Deposition: Precursors, Processes and Applications

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 | #2215693 in Books |  Royal Society of Chemistry |  2009-01-21 | Original language:English | PDF # 1 |  9.69 x1.50 x7.44l,2.95 | File type: PDF | 600 pages

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Chemical Vapour Deposition (CVD) involves the deposition of thin solid films from chemical precursors in the vapour phase, and encompasses a variety of deposition techniques, including a range of thermal processes, plasma enhanced CVD (PECVD), photon- initiated CVD, and atomic layer deposition (ALD). The development of CVD technology owes a great deal to collaboration between different scientific disciplines such as chemistry, physics, materials science, engineering and ...

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